100mm Travel, High Vacuum (10 -6 Torr) Motorized Linear Stage, Integrated Controller

Product Details Low Vacuum (10 -3 Torr) and High Vacuum (10 -6 Torr) Options Available 360° Rotational, Linear, or Vertical Travel Stages, and Goniometer Options Available Controlled via Minimal Feed-Through Wires Zaber Vacuum Compatible Motorized Stages are designed for integration into vacuum systems and are available in high vacuum 10 -6 Torr stages or low vacuum 10 -3 Torr configurations (upon request). The stage body components are specifically engineered to limit outgassing of contaminants in the vacuum chamber, the included stepper motors are designed for thermal management in high vacuum environments, and the stages can be connected to a computer interface with minimal feed-through wires. Zaber Vacuum Compatible Motorized Stages are available in linear, 360° rotational, and goniometric configurations, allowing for a complete 6 Degree-of-Freedom system to be constructed in a vacuum. These stages are ideal for applications operating in high vacuum conditions, such as semiconductor manufacturing and processing, or optical coating processes. Note: An accessories kit, #75-301 , is required and sold separately. U.S. Tariff Pricing Notice: Pricing for certain products in this family may reflect recent changes in U.S. tariffs on Canadian-origin products. Prices shown include any applicable tariff-related adjustment; no additional tariff surcharge will be added at checkout. Specifications General Type: Metric Encoder: No Manual Control/ LED Indicators: No/Yes Manufacturer: Zaber Technologies Inc. Model Number: X-LSM100A-SV2T9 Note: Requires Accessory Kit, #75-301 , for operation. Type of Motor: 2-Phase Stepper Physical & Mechanical Properties Type of Movement: Linear (X) Guide System: Needle Roller Bearing Stage Size (mm): 224.2 x 152.0 Travel (mm): 101.6 Accuracy (μm): 20 Backlash (μm): <12 Height (mm): 21.4 Load Capacity (kg): 10 Load Capacity (N): 100 Repeatability (μm): <3 Speed (mm/s): 0.000029 - 24 Thrust (N): 35 Weight (kg): 0.43 Optical Properties Resolution (μm): 0.047 Electrical Current (mA): 350 Maximum Operating Current (mA): 350 Hardware & Interface Connectivity Type of Drive: Lead Screw Power Supply: 24-48 VDC; Power Supply w/US Plug found in accessories kit, #75-301 Computer Interface: RS-232, USB Material Properties Vacuum Compatibility: High vacuum (10 -6 Torr) Environmental & Durability Factors Operating Temperature (°C): 0 to +50 Regulatory Compliance RoHS 2015: Compliant × Certificate of Conformance: View × Reach 247: Compliant ×